Reflective spatial light modulator, optical observation device and optical irradiation device
Abstract:
A reflective spatial light modulator includes a perovskite-type electro-optic crystal having a relative permittivity of 1,000 or higher, a light input and output unit disposed on an input surface of the electro-optic crystal and including a first electrode through which input light is transmitted, a light reflecting unit including a plurality of second electrodes disposed on a rear surface of the electro-optic crystal and reflects the input light toward the light input and output unit, a drive circuit including a plurality of drive electrodes respectively corresponding to the plurality of second electrodes and for applying an electric field to a part between the first electrode and the second electrode by inputting an electrical signal to each of the plurality of drive electrodes, and a plurality of bumps which are disposed such that the plurality of second electrodes and the plurality of drive electrodes are electrically connected to each other.
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