发明授权
- 专利标题: Impedance-matched through-wafer transition using integrated heat-spreader technology
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申请号: US16559486申请日: 2019-09-03
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公开(公告)号: US10950562B1公开(公告)日: 2021-03-16
- 发明人: Eric M. Prophet , Florian G. Herrault
- 申请人: HRL Laboratories, LLC
- 申请人地址: US CA Malibu
- 专利权人: HRL Laboratories, LLC
- 当前专利权人: HRL Laboratories, LLC
- 当前专利权人地址: US CA Malibu
- 代理机构: Ladas & Parry
- 主分类号: H01L23/66
- IPC分类号: H01L23/66 ; H01L23/367 ; H01L23/04 ; H01L21/48 ; H01L21/768 ; H01L21/288 ; H01L21/52
摘要:
A microwave electronic component comprising a substrate having top and bottom substrate surfaces; the substrate comprising an aperture between the top and bottom substrate surfaces; a metallic heat sink filling the aperture; a microwave integrated circuit having a top circuit surface with at least one microwave signal port and a bottom circuit surface in contact with the metallic heat sink; a signal line comprising at least a metallic via between the top and bottom substrate surfaces, and a top signal conductor arranged between the microwave signal port and the metallic via; wherein the dimensions and location of the metallic via are chosen such that the metallic via forms, together with the metallic heat sink, a first impedance-matched non-coaxial transmission line.
信息查询
IPC分类: