- 专利标题: Manufacturing process of a pixel array of a thermal pattern sensor and associated sensor
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申请号: US16542236申请日: 2019-08-15
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公开(公告)号: US10949638B2公开(公告)日: 2021-03-16
- 发明人: Jean-Francois Mainguet , Joel-Yann Fourre , Christophe Serbutoviez , Mohammed Benwadih
- 申请人: IDEMIA IDENTITY & SECURITY FRANCE , COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 申请人地址: FR Courbevoie; FR Paris
- 专利权人: IDEMIA IDENTITY & SECURITY FRANCE,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人: IDEMIA IDENTITY & SECURITY FRANCE,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人地址: FR Courbevoie; FR Paris
- 代理机构: Womble Bond Dickinson (US) LLP
- 优先权: FR1857511 20180816
- 主分类号: G06K9/00
- IPC分类号: G06K9/00 ; A61B5/1172 ; G01K7/00 ; G06K9/20 ; G06K9/78 ; G01J5/34 ; H01L37/02
摘要:
The invention relates to a manufacturing process of a pixel array of a thermal pattern sensor comprising the steps of: providing a substrate; depositing a first layer of electrically conductive material, including depositing electrically conductive tracks, depositing of connector pins and depositing a ground strip; depositing of second layer of pyroelectric material covering the tracks and leaving at least part of the connector pins free; depositing of third layer of electrically conductive material; depositing of fourth layer of dielectric material in contact with the third layer; depositing of a fifth layer including electrically conductive heating tracks; depositing of a sixth protective layer, wherein the step of depositing the second and/or third and/or fourth and/or sixth layer is carried out by slot-die coating.
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