- 专利标题: Bump structure manufacturing method
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申请号: US16310976申请日: 2017-12-28
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公开(公告)号: US10937751B2公开(公告)日: 2021-03-02
- 发明人: Jin Kuk Lee
- 申请人: LBSEMICON CO., LTD.
- 申请人地址: KR Gyeonggi-do
- 专利权人: LBSEMICON CO., LTD.
- 当前专利权人: LBSEMICON CO., LTD.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Mayer & Williams PC
- 代理商 Stuart H. Mayer
- 优先权: KR10-2017-0028343 20170306
- 国际申请: PCT/KR2017/015668 WO 20171228
- 国际公布: WO2018/164359 WO 20180913
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L21/304 ; H01L21/683 ; H01L21/78
摘要:
Provided is a method of manufacturing a bump structure, the method including a first step for preparing a wafer including a plurality of chips each including a die pad, an under bump metal (UBM) layer on the die pad, and a bump pattern on the UBM layer, a second step for attaching a backgrinding film to an upper surface of the wafer, a third step for grinding a rear surface of the wafer by a certain thickness, a fourth step for forming a flexible material layer on a second rear surface of the wafer after being ground, and then attaching dicing tape including a ring frame, to the flexible material layer, a fifth step for removing the backgrinding film and then performing a curing process to harden the flexible material layer, and a sixth step for performing a dicing process to cut the plurality of chips into individual chips.
公开/授权文献
- US20200266163A1 BUMP STRUCTURE MANUFACTURING METHOD 公开/授权日:2020-08-20
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