- 专利标题: Physical quantity sensor, electronic device, and vehicle
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申请号: US16118960申请日: 2018-08-31
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公开(公告)号: US10935567B2公开(公告)日: 2021-03-02
- 发明人: Shuichi Kawano
- 申请人: Seiko Epson Corporation
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JPJP2017-168289 20170901
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; G01C19/00 ; G01P15/08 ; G01C19/5705
摘要:
In a physical quantity sensor, wirings provided on a projection and a bonding pad form a silicide layer and are electrically connected. The wirings are multilayered films. A noble metal layer covers the projection and contacts the bonding pad to form the silicide layer. A metal layer extends between the noble metal layer and a base substrate. The metal layer, the noble metal layer, an adhesion layer, and an insulating layer are stacked in this order from the base substrate in all areas except for atop the projection.
公开/授权文献
- US20190072580A1 Physical Quantity Sensor, Electronic Device, And Vehicle 公开/授权日:2019-03-07
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