- 专利标题: Method for determining location of power feeding point in electroplating apparatus and electroplating apparatus for plating rectangular substrate
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申请号: US16196985申请日: 2018-11-20
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公开(公告)号: US10934630B2公开(公告)日: 2021-03-02
- 发明人: Mitsuhiro Shamoto , Mizuki Nagai , Naoto Takahashi
- 申请人: EBARA CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: EBARA CORPORATION
- 当前专利权人: EBARA CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: BakerHostetler
- 优先权: JPJP2017-225079 20171122
- 主分类号: C25D17/00
- IPC分类号: C25D17/00 ; H01L21/288 ; H01L23/00 ; C25D21/12 ; H01L21/768 ; C25D21/10
摘要:
To optimize a location of a power feeding point with the use of a square substrate. There is disclosed a method for determining a location of a power feeding point in an electroplating apparatus. The electroplating apparatus is configured to plate a rectangular substrate having a substrate area of S. The rectangular substrate has opposed two sides coupled to a power supply. The rectangular substrate has a length L of the sides coupled to the power supply and a length W of sides not coupled to the power supply meeting a condition of 0.8×L≤W≤L. The method includes determining a number N of the power feeding points according to the substrate area S.
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