- 专利标题： Mask assembly, and apparatus and method for manufacturing display apparatus including the mask assembly
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申请号： US16534363申请日： 2019-08-07
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公开(公告)号： US10903459B2公开(公告)日： 2021-01-26
- 发明人: Yonghwan Kim
- 申请人： SAMSUNG DISPLAY CO., LTD.
- 申请人地址： KR Yongin-si
- 专利权人： SAMSUNG DISPLAY CO., LTD.
- 当前专利权人： SAMSUNG DISPLAY CO., LTD.
- 当前专利权人地址： KR Yongin-si
- 代理机构： Lewis Roca Rothgerber Christie LLP
- 优先权： KR10-2018-0102175 20180829
- 主分类号： H01L51/56
- IPC分类号： H01L51/56 ; H01L51/00 ; C23C14/04 ; H01L27/32
摘要：
A mask assembly includes a mask frame, a mask on the mask frame and including at least one opening through which a deposition material passes, and a stick on the mask frame and extending over the opening, wherein the stick includes a stick body portion connected to the mask frame and extending over the opening, and a protrusion protruding from the stick body portion toward the opening.
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