- 专利标题: Piezoelectric sensor and instrument including such a sensor
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申请号: US15561499申请日: 2016-03-24
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公开(公告)号: US10854807B2公开(公告)日: 2020-12-01
- 发明人: Didier Rouxel , Brice Vincent , Laurent Badie
- 申请人: UNIVERSITÉ DE LORRAINE
- 申请人地址: FR Nancy
- 专利权人: UNIVERSITÉ DE LORRAINE
- 当前专利权人: UNIVERSITÉ DE LORRAINE
- 当前专利权人地址: FR Nancy
- 代理机构: Kenealy Vaidya LLP
- 优先权: FR1552487 20150325
- 国际申请: PCT/FR2016/050650 WO 20160324
- 国际公布: WO2016/151252 WO 20160929
- 主分类号: H01L41/113
- IPC分类号: H01L41/113 ; G01H11/08 ; H01L41/18 ; H01L41/02
摘要:
Some embodiments are directed to a piezoelectric sensor, including a body with a central cavity; and a membrane extending over the cavity, which membrane is fastened to the body via its periphery and includes a carrier layer made of polymer and a sensitive layer made of piezoelectric polymer, the membrane being able to deform or vibrate. The sensitive layer is made of a material including a polymer filled with inorganic nanomaterials. Instrument including such a sensor.
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