Piezoelectric sensor and instrument including such a sensor
摘要:
Some embodiments are directed to a piezoelectric sensor, including a body with a central cavity; and a membrane extending over the cavity, which membrane is fastened to the body via its periphery and includes a carrier layer made of polymer and a sensitive layer made of piezoelectric polymer, the membrane being able to deform or vibrate. The sensitive layer is made of a material including a polymer filled with inorganic nanomaterials. Instrument including such a sensor.
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