Invention Grant
- Patent Title: Vertical memory devices and methods of manufacturing the same
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Application No.: US16730276Application Date: 2019-12-30
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Publication No.: US10854632B2Publication Date: 2020-12-01
- Inventor: Kohji Kanamori , Young-Hwan Son , Byung-Kwan You , Eun-Taek Jung
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2017-0155722 20171121
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L21/28 ; H01L49/02 ; H01L27/1157 ; H01L29/66 ; H01L21/56 ; H01L21/764 ; H01L21/768 ; H01L23/532 ; H01L29/423

Abstract:
A vertical memory device includes first, second and third impurity regions sequentially stacked in a first direction substantially perpendicular to an upper surface of a substrate, a gate electrode structure including gate electrodes spaced apart from each other in the first direction on the third impurity region, a channel extending through the gate electrode structure, the second and third impurity regions, and an upper portion of the first impurity region on the substrate in the first direction, and a charge storage structure covering a portion of an outer sidewall and a lower surface of the channel. The channel directly contacts a sidewall of the second impurity region.
Public/Granted literature
- US20200144288A1 VERTICAL MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2020-05-07
Information query
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