Invention Grant
- Patent Title: Ion milling apparatus and sample holder
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Application No.: US16299632Application Date: 2019-03-12
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Publication No.: US10832888B2Publication Date: 2020-11-10
- Inventor: Shogo Kataoka , Toru Kagawa
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@f97ce42
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/26 ; H01J37/305

Abstract:
There is provided an ion milling apparatus and sample holder permitting one to observe a sample, which has been milled, with an electron microscope without transferring the sample to a different holding member. The ion milling apparatus has an ion source, a sample holder, and a sample stage. The sample holder includes: a holder body having a sample holding portion for holding the sample; and a cover member detachably mounted to the holder body and hermetically sealing the sample held on the sample holding portion. The holder body has a shield plate and a field-correcting plate for correcting electric fields around the sample held on the sample holding portion.
Public/Granted literature
- US20190287755A1 Ion Milling Apparatus and Sample Holder Public/Granted day:2019-09-19
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