Invention Grant
- Patent Title: Magnetic head including spin torque oscillator and manufacturing method for the same
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Application No.: US16574880Application Date: 2019-09-18
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Publication No.: US10803888B1Publication Date: 2020-10-13
- Inventor: Yoshitaka Sasaki , Hiroyuki Ito , Kazuki Sato , Shigeki Tanemura , Hironori Araki , Yoji Nomura , Tetsuya Roppongi , Atsushi Yamaguchi
- Applicant: Yoshitaka Sasaki , Hiroyuki Ito , Kazuki Sato , Shigeki Tanemura , Hironori Araki , Yoji Nomura , Tetsuya Roppongi , Atsushi Yamaguchi
- Applicant Address: US CA Milpitas
- Assignee: HEADWAY TECHNOLOGIES, INC.
- Current Assignee: HEADWAY TECHNOLOGIES, INC.
- Current Assignee Address: US CA Milpitas
- Agency: Oliff PLC
- Main IPC: G11B5/115
- IPC: G11B5/115 ; G11B5/39 ; C23F4/04

Abstract:
A manufacturing method for a magnetic head includes the steps of: forming a main pole; forming a spin torque oscillator; and forming a trailing shield. The step of forming the spin torque oscillator includes: a step of forming a layered film; a step of forming an interposition layer; a step of forming a mask; a first etching step of etching a portion of the interposition layer using the mask; a second etching step of etching a portion of the layered film using the mask and the interposition layer as an etching mask; a step of removing the interposition layer and the mask; and a patterning step of patterning the layered film into the spin torque oscillator.
Information query
IPC分类: