- 专利标题: Mask and fabricating method thereof
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申请号: US15580150申请日: 2017-11-27
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公开(公告)号: US10784469B2公开(公告)日: 2020-09-22
- 发明人: Liang Jiang , Jinchuan Li
- 申请人: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- 申请人地址: CN Shenzhen
- 专利权人: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- 当前专利权人: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- 当前专利权人地址: CN Shenzhen
- 代理机构: Hemisphere Law, PLLC
- 代理商 Zhigang Ma
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@47ac147b
- 国际申请: PCT/CN2017/113079 WO 20171127
- 国际公布: WO2019/075857 WO 20190425
- 主分类号: C23C14/04
- IPC分类号: C23C14/04 ; C23C16/04 ; H01L51/00 ; H01L51/56 ; C23C14/24 ; B05C21/00
摘要:
A mask and a fabricating method thereof are provided. In the mask, a plurality of pairs of grooves corresponding to the plurality of mask sheets are disposed on a mask frame, each of the mask sheets includes a portion overlapping with a corresponding pair of grooves, and includes a plurality of pairs of locking fittings; each of the locking fittings includes an engaging portion and two connecting portions disposed on two sides thereof; the engaging portion are engaged with the corresponding grooves to clamp a portion of the mask sheet overlapping with the grooves, and the connecting portions are detachably connected with the mask frame to fix the plurality of mask sheets on the mask frame; during the rework process of the mask, only the locking fittings need to be removed to separate the mask frame and the mask sheets, so the mask frame does not need to be polished.
公开/授权文献
- US20200020890A1 MASK AND FABRICATING METHOD THEREOF 公开/授权日:2020-01-16
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