- 专利标题: Saddle channel thin film transistor for driving micro LEDs or OLEDs in ultrahigh resolution displays
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申请号: US15390366申请日: 2016-12-23
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公开(公告)号: US10784325B2公开(公告)日: 2020-09-22
- 发明人: Khaled Ahmed , Prashant Majhi , Kunjal Parikh
- 申请人: INTEL CORPORATION
- 申请人地址: US CA Santa Clara
- 专利权人: INTEL CORPORATION
- 当前专利权人: INTEL CORPORATION
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L27/32
- IPC分类号: H01L27/32 ; H01L29/786 ; H01L27/12
摘要:
A thin film transistor (TFT) to control a light emitting diode (LED) or an organic light emitting diode (OLED) includes a channel region configured as a saddle channel extending between the drain region and the source region of the TFT. The saddle channel is formed by deposition of channel material on a fin structure, and the contour of the saddle channel is defined by the contour of the fin structure. Deposition of the channel material for the saddle channel may be performed by: (i) atomic layer deposition (ALD) of amorphous silicon; (ii) ALD of amorphous silicon followed by annealing to form polycrystalline silicon; or (iii) deposition of indium gallium zinc oxide (IGZO) material by one of ALD, plasma-enhanced atomic layer deposition (PEALD), chemical vapor deposition (CVD), or plasma-enhanced chemical vapor deposition (PECVD).
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