- 专利标题: Method of manufacturing semiconductor package using side molding
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申请号: US16211421申请日: 2018-12-06
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公开(公告)号: US10784228B2公开(公告)日: 2020-09-22
- 发明人: Do Hyung Kim , Sang Hoon An
- 申请人: LBSEMICON CO., LTD.
- 申请人地址: KR Gyeonggi-Do
- 专利权人: LBSEMICON CO., LTD.
- 当前专利权人: LBSEMICON CO., LTD.
- 当前专利权人地址: KR Gyeonggi-Do
- 代理机构: Mayer & Williams PC
- 代理商 Stuart H. Mayer
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@46adbc26
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L21/56 ; H01L21/78 ; H01L21/304
摘要:
Provided is a method of manufacturing a semiconductor package, the method including forming sawing grooves by sawing a wafer along individual chip boundaries in a downward direction from a top surface of the wafer by a thickness less than a wafer thickness, filling the sawing grooves with a molding material, forming a redistribution pattern, a passivation pattern, and an under bump metal (UBM) pattern on the wafer, bonding solder balls onto the UBM pattern, thinning the wafer based on a backgrinding process, and dividing the wafer into individual chips by sawing the molding material filled in the sawing grooves, in a downward direction.
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