- 专利标题： BEOL embedded high density vertical resistor structure
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申请号： US16531846申请日： 2019-08-05
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公开(公告)号： US10784194B2公开(公告)日： 2020-09-22
- 发明人: Alexander Reznicek , Oscar van der Straten , Praneet Adusumilli
- 申请人： International Business Machines Corporation
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Scully, Scott, Murphy & Presser, P.C.
- 代理商 Daniel P. Morris, Esq.
- 主分类号： H01L23/522
- IPC分类号： H01L23/522 ; H01L49/02 ; H01L21/768 ; H01L27/08
摘要：
Embedded resistors which have tunable resistive values located between interconnect levels are provided. The embedded resistors have a pillar structure, i.e., they have a height that is greater than their width, thus they occupy less real estate as compared with conventional planar resistors that are typically employed in BEOL technology.
公开/授权文献
- US20190355661A1 BEOL EMBEDDED HIGH DENSITY VERTICAL RESISTOR STRUCTURE 公开/授权日：2019-11-21
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