- 专利标题: Quadrature ADC feedback compensation for capacitive-based MEMS gyroscope
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申请号: US15908660申请日: 2018-02-28
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公开(公告)号: US10782131B2公开(公告)日: 2020-09-22
- 发明人: Gregory B. Arndt , Christopher C. Painter
- 申请人: Apple Inc.
- 申请人地址: US CA Cupertino
- 专利权人: Apple Inc.
- 当前专利权人: Apple Inc.
- 当前专利权人地址: US CA Cupertino
- 代理机构: Fish & Richardson P.C.
- 主分类号: G01C19/5776
- IPC分类号: G01C19/5776 ; H03M1/06 ; G01D5/24 ; H03D3/00 ; H03D3/02 ; H03G3/20
摘要:
A quadrature ADC feedback compensation system and method for MEMS gyroscope is disclosed. In an embodiment, a MEMS gyroscope comprises an analog processing chain including a drive circuit for generating an analog drive signal and a sense circuit that is configured to generate an analog rate signal and an analog quadrature signal in response to a change in capacitance output by the MEMS gyroscope. A compensation circuit coupled to the sense circuit is configured to null the analog quadrature signal using the analog drive signal and a compensation value, and to adaptively compensate, in a digital processing chain, a quadrature-induced rate offset of a digital rate signal over temperature using a digital quadrature signal, the compensation value and temperature data.
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