- 专利标题: Heat treatment apparatus
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申请号: US15443379申请日: 2017-02-27
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公开(公告)号: US10781130B2公开(公告)日: 2020-09-22
- 发明人: Kazuya Uchida , Takashi Koshigai
- 申请人: SHIN-ETSU CHEMICAL CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人: SHIN-ETSU CHEMICAL CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Greenblum & Bernstein, P.L.C.
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@711a5863
- 主分类号: C03B32/02
- IPC分类号: C03B32/02 ; C03B37/014 ; C03B37/10 ; F27B1/00 ; F27B1/12 ; F27B9/14 ; F27D11/02
摘要:
A heat treatment apparatus includes: a furnace core tube made of silica glass; a heater provided adjacent to the furnace core tube, the heater heating a heating region; and a moving mechanism supporting a porous glass base material and relatively moving the porous glass base material with respect to the heater in the furnace core tube in a state where the heating region is heated by the heater to make the porous glass base material pass through the heating region. The heat treatment apparatus includes a thin-walled part provided in a region adjacent to a portion located in the heating region in the furnace core tube, the thin-walled part having a thickness of glass less than that of the portion located in the heating region.
公开/授权文献
- US20170253520A1 HEAT TREATMENT APPARATUS 公开/授权日:2017-09-07
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