- 专利标题: Microfabrication technology for producing sensing cells for molecular electronic transducer based seismometer
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申请号: US15037449申请日: 2014-11-20
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公开(公告)号: US10712457B2公开(公告)日: 2020-07-14
- 发明人: Hongyu Yu , Hai Huang
- 申请人: Hongyu Yu , Hai Huang
- 申请人地址: US AZ Scottsdale
- 专利权人: Arizona Board of Regents on behalf of Arizona State University
- 当前专利权人: Arizona Board of Regents on behalf of Arizona State University
- 当前专利权人地址: US AZ Scottsdale
- 代理机构: Quarles & Brady LLP
- 国际申请: PCT/US2014/066504 WO 20141120
- 国际公布: WO2015/077394 WO 20150528
- 主分类号: G01V1/18
- IPC分类号: G01V1/18 ; G01H11/06 ; G01P13/00
摘要:
The invention relates to microfabrication technology for producing sensing cells, for use, for example, in molecular electronic transducer (MET) based seismometers devices. In some aspects, a method for fabricating a sensing element is provided. The method includes providing a first wafer including a first substrate, a second substrate, and a first insulating layer between therebetween, etching a first fluid throughhole through the first substrate, the first insulating layer, and the second substrate, and coating the first substrate and second substrate with a first and second conductive coating, respectively. The method also includes providing a second wafer including a third substrate, a fourth substrate, and a second insulating layer therebetween, etching a second fluid throughhole through the third substrate, the second insulating layer, and the fourth substrate, and coating the third substrate with a third conductive coating from top and the fourth substrate with a fourth conductive coating from back.
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