Invention Grant
- Patent Title: Piezoelectric element and liquid ejection head
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Application No.: US16352921Application Date: 2019-03-14
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Publication No.: US10686117B2Publication Date: 2020-06-16
- Inventor: Koichi Morozumi , Hiromu Miyazawa , Toshihiro Shimizu , Ichiro Asaoka
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3bbfe027
- Main IPC: H01L41/187
- IPC: H01L41/187 ; B41J2/14 ; H01L41/083 ; H01L41/08

Abstract:
A piezoelectric element includes a first electrode disposed over a substrate, an orientation control layer disposed over the first electrode and containing titanium, a piezoelectric layer disposed over the orientation control layer and having a perovskite crystal structure, and a second electrode disposed over the piezoelectric layer. The orientation control layer has a thickness in the range of 5.0 nm to 22.0 nm.
Public/Granted literature
- US20190288179A1 PIEZOELECTRIC ELEMENT AND LIQUID EJECTION HEAD Public/Granted day:2019-09-19
Information query
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