Invention Grant
- Patent Title: Semiconductor device and method of forming substrate including embedded component with symmetrical structure
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Application No.: US16267142Application Date: 2019-02-04
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Publication No.: US10665662B2Publication Date: 2020-05-26
- Inventor: JinHee Jung , HyungSang Park , SungSoo Kim
- Applicant: STATS ChipPAC Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Brian M. Kaufman; Robert D. Atkins
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H05K1/18 ; H01L23/538 ; H01L21/683 ; H01L23/00 ; H01L23/498 ; H01L23/50 ; H01L21/48 ; H05K3/46

Abstract:
A semiconductor device comprises a first conductive layer. A second conductive layer is formed over the first conductive layer. A semiconductor component is disposed over the first conductive layer. The second conductive layer lies in a plane between a top surface of the semiconductor component and a bottom surface of the semiconductor component. A third conductive layer is formed over the semiconductor component opposite the first conductive layer. The semiconductor device includes a symmetrical structure. A first insulating layer is formed between the first conductive layer and semiconductor component. A second insulating layer is formed between the semiconductor component and third conductive layer. A height of the first insulating layer between the first conductive layer and semiconductor component is between 90% and 110% of a height of the second insulating layer between the semiconductor component and third conductive layer. The semiconductor component includes a passive device.
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