Invention Grant
- Patent Title: Methods of prototyping and manufacturing with cleanspace fabricators
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Application No.: US15241419Application Date: 2016-08-19
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Publication No.: US10651063B2Publication Date: 2020-05-12
- Inventor: Frederick A. Flitsch
- Applicant: Frederick A. Flitsch
- Agent Frederick A. Flitsch
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B08B15/00 ; G05B19/418 ; H01L21/677
Abstract:
The present invention provides various aspects for processing multiple types of substrates within cleanspace fabricators or for processing multiple or single types of substrates in multiple types of cleanspace environments. In some embodiments, a collocated composite cleanspace fabricator may be capable of processing semiconductor devices into integrated circuits and then performing assembly operations to result in product in packaged form.
Public/Granted literature
- US20160358795A1 METHODS OF PROTOTYPING AND MANUFACTURING WITH CLEANSPACE FABRICATORS Public/Granted day:2016-12-08
Information query
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