Invention Grant
- Patent Title: Multiple-bit electrical fuses
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Application No.: US16012951Application Date: 2018-06-20
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Publication No.: US10586799B2Publication Date: 2020-03-10
- Inventor: Kangguo Cheng , Ramachandra Divakaruni
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L27/112
- IPC: H01L27/112 ; H01L23/525 ; H01L23/00

Abstract:
A method for forming a semiconductor device includes forming a nanosheet stack comprising alternating layers of a first material and a second material on a substrate. The method further includes removing portions of the stack to form tapered stack sidewalls, which have a taper angle in relation to a horizontal surface of the substrate. The method further includes converting the second material to a resistive material. The layers that include the resistive material form one or more electrical fuses.
Public/Granted literature
- US20180323203A1 MULTIPLE-BIT ELECTRICAL FUSES Public/Granted day:2018-11-08
Information query
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