- 专利标题: Calibration of directed self-assembly models using programmed defects of varying topology
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申请号: US15883892申请日: 2018-01-30
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公开(公告)号: US10586013B2公开(公告)日: 2020-03-10
- 发明人: Kafai Lai
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Ryan, Mason & Lewis, LLP
- 代理商 Vazken Alexanian
- 主分类号: G06F17/50
- IPC分类号: G06F17/50 ; H01L21/027 ; G06F17/13
摘要:
Techniques are provided for calibrating physical directed self-assembly (DSA) models. For example, an experimental DSA process is performed using a block copolymer (BCP) material and a DSA guiding pattern with a predefined defect formed as part of the DSA guiding pattern. A difference in size (e.g., shrinkage) is determined between a size of the predefined defect of the DSA guiding pattern and a remaining size of a morphological defect in the BCP material as assembled at a completion of the experimental DSA process. The difference in size is utilized as calibration data in a DSA simulation system to calibrate a simulated physical DSA model which defines a simulated DSA process that corresponds to the experimental DSA process. The simulated physical DSA model defines a simulated guiding pattern with a programmed defect, which corresponds to the DSA guiding pattern and the predefined defect.
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