Invention Grant
- Patent Title: Extreme ultraviolet light generation apparatus
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Application No.: US16536055Application Date: 2019-08-08
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Publication No.: US10582602B2Publication Date: 2020-03-03
- Inventor: Atsushi Ueda , Akihiro Takayama
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G03F7/20
Abstract:
An extreme ultraviolet light generation apparatus includes: a chamber; an EUV light focusing mirror located in the chamber; and a hydrogen gas release unit that is located in the chamber and includes an opening configured to release a hydrogen gas inward from around the EUV light focusing mirror and a first cooling medium channel through which a cooling medium passes.
Public/Granted literature
- US20190364654A1 EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS Public/Granted day:2019-11-28
Information query
