Invention Grant
- Patent Title: Tetrode extraction apparatus for ion source
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Application No.: US16227296Application Date: 2018-12-20
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Publication No.: US10573485B1Publication Date: 2020-02-25
- Inventor: Wilhelm Platow , Edward Eisner , Bo Vanderberg , Neil Bassom , Michael Cristoforo , Joshua Abeshaus
- Applicant: Axcelis Technologies, Inc.
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/317

Abstract:
An electrode system for an ion source has a source electrode that defines a source aperture in an ion source chamber, and is coupled to a source power supply. A first ground electrode defines a first ground aperture that is electrically coupled to an electrical ground potential and extracts ions from the ion source. A suppression electrode is positioned downstream of the first ground electrode and defines a suppression aperture that is electrically coupled to a suppression power supply. A second ground electrode is positioned downstream of the suppression electrode and defines a second ground aperture. The first and second ground electrodes are fixedly coupled to one another and are electrically coupled to the electrical ground potential.
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