- 专利标题: BEOL vertical fuse formed over air gap
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申请号: US15956355申请日: 2018-04-18
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公开(公告)号: US10546813B2公开(公告)日: 2020-01-28
- 发明人: Marc A. Bergendahl , James J. Demarest , Christopher J. Penny , Christopher J. Waskiewicz
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Tutunjian & Bitetto, P.C.
- 代理商 Vazken Alexanian
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L23/525 ; H01L23/532 ; H01L21/768 ; H01L23/522 ; H01L23/528
摘要:
A method of forming an electrical device that includes forming a first level including an array of metal lines, wherein an air gap is positioned between the adjacent metal lines. A second level is formed including at least one dielectric layer atop the first level. A plurality of trench structures is formed in the at least on dielectric layer. At least one of the plurality of trench structures opens the air gap. A conductive material is formed within the trenches. The conductive material deposited in the open air gap provides a vertical fuse.
公开/授权文献
- US20180240752A1 BEOL VERTICAL FUSE FORMED OVER AIR GAP 公开/授权日:2018-08-23
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