- 专利标题: Light measurement device and optical axis adjustment method
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申请号: US16322592申请日: 2017-08-07
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公开(公告)号: US10545016B2公开(公告)日: 2020-01-28
- 发明人: Takeshi Akagawa , Masahiro Kubo , Katsumi Abe , Kimiyasu Takoh , Ersin Altintas , Yuji Ohno , Tetsuri Ariyama , Ichiro Ishimaru
- 申请人: NEC CORPORATION , NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
- 申请人地址: JP Tokyo JP Takamatsu-shi, Kagawa
- 专利权人: NEC CORPORATION,NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
- 当前专利权人: NEC CORPORATION,NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
- 当前专利权人地址: JP Tokyo JP Takamatsu-shi, Kagawa
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2016-160516 20160818
- 国际申请: PCT/JP2017/028608 WO 20170807
- 国际公布: WO2018/034188 WO 20180222
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01J3/45
摘要:
A light measurement device that maintains high measurement precision. The light measurement device includes: light source that irradiates light upon measurement object; branch part that splits transmitted light or reflected light from measurement object; phase-changing unit that changes the phase of one beam of the branched light beams; phase-fixing unit that maintains the phase of the other beam of the branched light beams; adjustment mechanism, which is provided in phase-changing unit or phase-fixing unit, for adjusting the propagation direction of light; multiplexer that causes the light emitted by each of phase-changing unit and phase-fixing unit to interfere with each other; detection unit that detects light that is interfered with by multiplexer; and control unit that controls the adjustment mechanism on the basis of the luminance values of an interference image that is detected by detection unit and adjusts the propagation direction of light in phase-changing unit or phase-fixing unit.
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