- 专利标题： Integrated photodetector waveguide structure with alignment tolerance
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申请号： US16161178申请日： 2018-10-16
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公开(公告)号： US10535787B2公开(公告)日： 2020-01-14
- 发明人: Solomon Assefa , Bruce W. Porth , Steven M. Shank
- 申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址： US NY Armonk
- 专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： US NY Armonk
- 代理机构： Roberts Mlotkowski Safran Cole & Calderon, P.C.
- 代理商 Steven Meyers; Andrews M. Calderon
- 主分类号： H01L31/18
- IPC分类号： H01L31/18 ; H01L31/0232 ; H01L31/028 ; G02B6/42 ; H01L31/09 ; G02B6/122 ; G02B6/136 ; H01L31/0203 ; G06F17/50 ; H01L29/06 ; H01L31/0304 ; G02B6/12 ; H01L31/0352 ; H01L31/20 ; G02B6/13
摘要：
An encapsulated integrated photodetector waveguide structures with alignment tolerance and methods of manufacture are disclosed. The method includes forming a waveguide structure bounded by one or more shallow trench isolation (STI) structure(s). The method further includes forming a photodetector fully landed on the waveguide structure.
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