- 专利标题: Dynamically adjustable focal spot
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申请号: US15544177申请日: 2015-12-18
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公开(公告)号: US10535491B2公开(公告)日: 2020-01-14
- 发明人: Martin Rommel , Louis P. Wainwright
- 申请人: American Science and Engineering, Inc.
- 申请人地址: US MA Billerica
- 专利权人: American Science and Engineering, Inc.
- 当前专利权人: American Science and Engineering, Inc.
- 当前专利权人地址: US MA Billerica
- 代理机构: Novel IP
- 国际申请: PCT/US2015/066603 WO 20151218
- 国际公布: WO2016/118271 WO 20160728
- 主分类号: H01L35/30
- IPC分类号: H01L35/30 ; H01J35/14 ; G21K1/02 ; H01J35/30
摘要:
Methods for maintaining a specified beam profile of an x-ray beam extracted from an x-ray target over a large range of extraction angles relative to the target. A beam of electrons is generated and directed toward a target at an angle of incidence with respect to the target, with the beam of electrons forming a focal spot corresponding to the cross-section of the electron beam. At least one of a size, shape, and orientation of the electron beam cross-section is dynamically varied as the extraction angle is varied, and the extracted x-ray beam is collimated. Dynamically varying the size, shape or orientation of the electron beam cross-section may be performed using focusing and stigmator coils.
公开/授权文献
- US20180012724A1 Dynamically Adjustable Focal Spot 公开/授权日:2018-01-11
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