发明授权
- 专利标题： Mask assembly, method of manufacturing thereof, and apparatus including the same
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申请号： US15218526申请日： 2016-07-25
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公开(公告)号： US10533245B2公开(公告)日： 2020-01-14
- 发明人: Soonchul Chang , Seungyong Song , Sungsoon Im , Kyuhwan Hwang , Minho Moon , Youngmin Moon
- 申请人： Samsung Display Co., Ltd.
- 申请人地址： KR Yongin-si
- 专利权人： Samsung Display Co., Ltd.
- 当前专利权人： Samsung Display Co., Ltd.
- 当前专利权人地址： KR Yongin-si
- 代理机构： H.C. Park & Associates, PLC
- 优先权： KR10-2016-0003679 20160112
- 主分类号： C23C14/04
- IPC分类号： C23C14/04 ; C23C16/04 ; B05C21/00 ; H01L51/00 ; C21D8/02
摘要：
A mask assembly, and an apparatus including the same are provided. The mask assembly includes a mask sheet. The mask sheet includes a pattern portion having openings, and a welding portion connected to the pattern portion. The welding portion has a grain size different from a grain size of the pattern portion.
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