- 专利标题: Package structure and method of manufacturing the same
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申请号: US15884254申请日: 2018-01-30
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公开(公告)号: US10510704B2公开(公告)日: 2019-12-17
- 发明人: Wei-Chih Chen , Hung-Jui Kuo , Yu-Hsiang Hu , Sih-Hao Liao
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: JCIPRNET
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L23/29
摘要:
A package structure and a method of forming the same are provided. The package structure includes a first die, an encapsulant, a first RDL structure, and a conductive terminal. The encapsulant is aside the first die, encapsulating sidewalls of the first die. The first RDL structure is on the first die and the encapsulant. The conductive terminal is electrically connected to first die through the RDL structure. The first RDL structure comprises a first polymer layer and a first RDL, the first polymer layer comprises a non-shrinkage material and a top surface of the first polymer layer is substantially flat.
公开/授权文献
- US20190237423A1 PACKAGE STRUCTURE AND METHOD OF MANUFACTURING THE SAME 公开/授权日:2019-08-01
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