Invention Grant
- Patent Title: Packaging structures for metallic bonding based opto-electronic device and manufacturing methods thereof
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Application No.: US15718919Application Date: 2017-09-28
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Publication No.: US10510683B2Publication Date: 2019-12-17
- Inventor: Wenjian Zhang , Qingjun Zhang , Yuanjing Li , Zhiqiang Chen , Ziran Zhao , Yinong Liu , Yaohong Liu , Xiang Zou , Huishao He , Shuwei Li , Nan Bai
- Applicant: Tsinghua University , NUCTECH COMPANY LIMITED
- Applicant Address: CN Haidian District, Beijing CN Haidian District, Beijing
- Assignee: Tsinghua University,NUCTECH COMPANY LIMITED
- Current Assignee: Tsinghua University,NUCTECH COMPANY LIMITED
- Current Assignee Address: CN Haidian District, Beijing CN Haidian District, Beijing
- Agency: Merchant & Gould P.C.
- Priority: CN201611120663 20161207
- Main IPC: H01L25/00
- IPC: H01L25/00 ; H01L23/00 ; H01L31/024 ; H01L31/18 ; H01L23/15 ; H01L23/498 ; H01L31/02 ; H01L31/0203 ; H01L27/146

Abstract:
The present disclosure proposes a packaging structure for a metallic bonding based opto-electronic device and a manufacturing method thereof. According to the embodiments, the packaging structure for an opto-electronic device may comprise an opto-electronic chip and a packaging base. The opto-electronic chip comprises: a substrate having a first substrate surface and a second substrate surface opposite to each other; an opto-electronic device formed on the substrate; and electrodes for the opto-electronic device which are formed on the first substrate surface. The packaging base has a first base surface and a second base surface opposite to each other, and comprises conductive channels extending from the first base surface to the second base surface. The opto-electronic chip is stacked on the packaging base in such a manner that the first substrate surface faces the packaging base, and the electrodes formed on the first substrate surface of the opto-electronic chip are bonded with corresponding conductive channels in the packaging base.
Public/Granted literature
- US20180158785A1 PACKAGING STRUCTURES FOR METALLIC BONDING BASED OPTO-ELECTRONIC DEVICE AND MANUFACTURING METHODS THEREOF Public/Granted day:2018-06-07
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