发明授权
- 专利标题: Flow sensor
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申请号: US15390756申请日: 2016-12-27
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公开(公告)号: US10508941B2公开(公告)日: 2019-12-17
- 发明人: Stefan Kostner , Thomas Kiefer , Lukas Mahler
- 申请人: Sensirion AG
- 申请人地址: CH Staefa ZH
- 专利权人: SENSIRION AG
- 当前专利权人: SENSIRION AG
- 当前专利权人地址: CH Staefa ZH
- 代理机构: JMB Davis Ben-David
- 优先权: EP15202841 20151228
- 主分类号: G01F1/688
- IPC分类号: G01F1/688 ; G01F1/696 ; G01P5/10 ; G01F1/684 ; A61B5/026
摘要:
The invention relates to a flow sensor (1), comprising: a semiconductor module (2) on which a temperature sensing means (13a, 13b) and a heat source (12) are arranged, a flow channel (6) for guiding the fluid medium in a flow direction (D), and a wall (W) delimiting the flow channel, wherein said heat source (12) and said temperature sensing means (13a, 13b) are configured such that they are in thermal contact with said wall (W). According to the invention, said wall (W) comprises a glass member (4) and a metal member (3a), wherein the glass member (4) is connected to the metal member (3a).
公开/授权文献
- US20170184433A1 FLOW SENSOR 公开/授权日:2017-06-29
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