- 专利标题: RF resonator membranes and methods of construction
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申请号: US15468609申请日: 2017-03-24
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公开(公告)号: US10508364B2公开(公告)日: 2019-12-17
- 发明人: Dror Hurwitz
- 申请人: ZHUHAI CRYSTAL RESONANCE TECHNOLOGIES CO., LTD.
- 申请人地址: CN Zhuhai
- 专利权人: Zhuhai Crystal Resonance Technologies Co., Ltd.
- 当前专利权人: Zhuhai Crystal Resonance Technologies Co., Ltd.
- 当前专利权人地址: CN Zhuhai
- 代理机构: Wiggin and Dana LLP
- 代理商 Gregory S. Rosenblatt; Thomas M. Landman
- 主分类号: C30B29/32
- IPC分类号: C30B29/32 ; C30B23/06 ; C30B23/02 ; H03H9/02 ; H03H3/02
摘要:
A single crystal membrane of BaxSr(1-x)TiO3 (BST) has been fabricated for the first time using molecular beam epitaxy. The membrane typically has a thickness of 200 nm to 500 nm and the thickness may be controlled to within 1%. It may be fabricated on a sapphire wafer carrier from which it may subsequently be detached. The smoothness of the membrane has an RMS of less than 1 nm. This membrane is very promising for the next generation of RF filters.
公开/授权文献
- US20180274127A1 NOVEL RF RESONATOR MEMBRANES AND METHODS OF CONSTRUCTION 公开/授权日:2018-09-27
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