- 专利标题: Fluid control device and pump
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申请号: US15241576申请日: 2016-08-19
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公开(公告)号: US10480502B2公开(公告)日: 2019-11-19
- 发明人: Atsuhiko Hirata , Yukiharu Kodama
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: JP Kyoto
- 专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人地址: JP Kyoto
- 代理机构: Pearne & Gordon LLP
- 优先权: JP2014-031372 20140221; JP2014-180355 20140904
- 主分类号: F04B45/047
- IPC分类号: F04B45/047 ; F04B43/04
摘要:
A pump (1) includes a vibrating plate (15) that has a central part (21), a frame part (22), and connecting parts (23 to 26), a piezoelectric element (16) that is stacked over the central part (21) and configured to cause flexural vibrations to occur concentrically from the central part (21) to the connecting parts (23 to 26), and an opposed plate (13) that is stacked over the frame part (22) and positioned facing each of the connecting parts (23 to 26) with a spacing therebetween. The vibrating plate (15) has such a resonant mode that an antinode occurs in each of the central part (21) and the connecting parts (23 to 26). The opposed plate (13) has, at positions facing the connecting parts (23 to 26), a plurality of channel holes (39 to 43) through which a fluid flows.
公开/授权文献
- US20170058882A1 FLUID CONTROL DEVICE AND PUMP 公开/授权日:2017-03-02
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