Invention Grant
- Patent Title: Fabrication method of thin film transistor, fabrication method of array substrate, display panel, and display device
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Application No.: US15512981Application Date: 2016-09-06
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Publication No.: US10475906B2Publication Date: 2019-11-12
- Inventor: Tongshang Su , Shengping Du , Ning Liu , Dongfang Wang , Guangcai Yuan
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Dilworth & Barrese, LLP.
- Agent Michael J. Musella, Esq.
- Priority: CN201510718317 20151029
- International Application: PCT/CN2016/098168 WO 20160906
- International Announcement: WO2017/071405 WO 20170504
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/12 ; H01L29/786

Abstract:
A fabrication method of a thin film transistor, a fabrication method of an array substrate, a display panel, and a display device are provided. The fabrication method of the thin film transistor comprises: forming a gate electrode, a gate insulating layer and an oxide active layer; forming an inverted trapezoidal dissolution layer whose cross section is inverted trapezoidal on the oxide active layer, the inverted trapezoidal dissolution layer being soluble in an organic solvent; forming a source/drain layer on the oxide active layer, the gate insulating layer and the inverted trapezoidal dissolution layer, a thickness of the inverted trapezoidal dissolution layer being greater than a thickness of the source/drain layer; and dissolving and removing the inverted trapezoidal dissolution layer with the organic solvent and removing the source/drain layer on the inverted trapezoidal dissolution layer, to form a source electrode and a drain electrode.
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