- 专利标题: Wafer bonding methods and wafer-bonded structures
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申请号: US15919940申请日: 2018-03-13
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公开(公告)号: US10446519B2公开(公告)日: 2019-10-15
- 发明人: Jin Guang Cheng , Lin Bo Shi , Fu Cheng Chen
- 申请人: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- 申请人地址: CN Shanghai CN Beijing
- 专利权人: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- 当前专利权人: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- 当前专利权人地址: CN Shanghai CN Beijing
- 代理机构: Anova Law Group, PLLC
- 优先权: CN201710156402 20170316
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L25/00 ; H01L25/065 ; H01L21/027 ; H01L21/311
摘要:
A wafer bonding method includes providing a first wafer including a first wafer surface, forming a first metal layer on the first wafer surface, and forming a first annular retaining wall structure including a first annular retaining wall and a second annular retaining wall surrounded by the first annular retaining wall. The first metal layer is formed between the first annular retaining wall and the second annular retaining wall. The method includes providing a second wafer including a second wafer surface, forming a second metal layer on the second wafer surface, and forming a second annular retaining wall structure including a third annular retaining wall and a fourth annular retaining wall surrounded by the third annular retaining wall. The second metal layer is formed between the third annular retaining wall and the fourth annular retaining wall. The method further includes bonding the first metal layer to the second metal layer.
公开/授权文献
- US20180269178A1 WAFER BONDING METHODS AND WAFER-BONDED STRUCTURES 公开/授权日:2018-09-20
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