Sound converter arrangement with MEMS sound converter
摘要:
The present invention relates to a sound transducer assembly with a MEMS sound transducer for generating and/or detecting sound waves in the audible wavelength spectrum. The MEMS sound transducer includes a first cavity, and the sound transducer assembly includes an ASIC electrically connected to the MEMS sound transducer. The ASIC is embedded in a first substrate, and the first MEMS sound transducer is arranged on a second substrate. The first substrate and the second substrate are electrically connected to one another, and the first cavity is at least partially formed in one of the first substrate and the second substrate.
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