- 专利标题: Substrate rotary loader
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申请号: US14703851申请日: 2015-05-04
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公开(公告)号: US10403533B2公开(公告)日: 2019-09-03
- 发明人: Markus J. Stopper , Asaf Schlezinger
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson + Sheridan LLP
- 主分类号: H01L21/677
- IPC分类号: H01L21/677
摘要:
A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module for a substrate inspection station is disclosed herein. The loading module includes two arms, a plurality of substrate grippers, two rotatable support members, a conveyor, and at least one actuator. Each arm has a first end and a second end, wherein the second end is opposite the first end. Each substrate gripper is disposed at a respective end of each arm. Each rotatable support member is coupled to a respective one of the arms. The conveyor is disposed between the rotatable support members. The at least one actuator is configured to rotate the arms about the rotatable support members to selectively position the grippers over the conveyor in a location that allows a substrate held by the gripper to be released onto the conveyor.
公开/授权文献
- US20160325946A1 SUBSTRATE ROTARY LOADER 公开/授权日:2016-11-10
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