- 专利标题: Micro-LED transfer method, manufacturing method and display device
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申请号: US15986812申请日: 2018-05-23
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公开(公告)号: US10388634B2公开(公告)日: 2019-08-20
- 发明人: Quanbo Zou
- 申请人: Goertek, Inc.
- 申请人地址: CN Shandong
- 专利权人: Goertek, Inc.
- 当前专利权人: Goertek, Inc.
- 当前专利权人地址: CN Shandong
- 代理机构: Patent Law Works LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L25/075 ; H01L33/62 ; H01L33/00
摘要:
A micro-LED transfer method, manufacturing method and display device are disclosed. The method comprises: coating conductive photoresist on a receiving substrate, wherein the conductive photoresist is positive-tone photoresist; bonding a carrier substrate with the receiving substrate via the conductive photoresist, wherein metal electrodes of micro-LEDs on the carrier substrate are aligned with electrodes on the receiving substrate and are bonded with the electrodes on the receiving substrate via the conductive photoresist, and the carrier substrate is a transparent substrate; selectively lifting-off micro-LEDs from the carrier substrate through laser lifting-off using a first laser; and separating the carrier substrate from the receiving substrate.
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