- 专利标题: Apparatus and method for operating machinery under uniformly distributed mechanical pressure
-
申请号: US15166341申请日: 2016-05-27
-
公开(公告)号: US10388548B2公开(公告)日: 2019-08-20
- 发明人: Dori Alon Robissa
- 申请人: Texas Instruments Incorporated
- 申请人地址: US TX Dallas
- 专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人: TEXAS INSTRUMENTS INCORPORATED
- 当前专利权人地址: US TX Dallas
- 代理商 Ronald O. Neerings; Charles A. Brill; Frank D. Cimino
- 主分类号: B24B7/22
- IPC分类号: B24B7/22 ; B24B37/34 ; B24B49/16 ; B65G47/91 ; H01L21/67 ; H01L21/683
摘要:
A method of certifying uniform distribution of mechanical pressure comprises an apparatus for moving an object, the apparatus including an arm (410) with a joint (430) for adjusting a fixture (420) having a flat surface area (420a). The fixture includes vacuum suction for holding the object. The method further uses a pressure sensor (450) with a flat surface area (450a), displaying output voltage as a function of mechanical pressure applied. When the sensor is placed on a chuck with vacuum suction, the apparatus moves (460) to bring the flat fixture surface in touch with the flat sensor. Mechanical pressure is applied from the fixture to the sensor; the voltage output of the sensor is monitored to certify uniform distribution of the fixture pressure across the sensor area.
公开/授权文献
信息查询