Invention Grant
- Patent Title: Imprint apparatus and method of controlling the same
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Application No.: US15964548Application Date: 2018-04-27
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Publication No.: US10376915B2Publication Date: 2019-08-13
- Inventor: Ken Katsuta
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: JP2017-092563 20170508
- Main IPC: B05C11/10
- IPC: B05C11/10 ; B41J2/015 ; B81C1/00 ; B05D1/26 ; B41J2/045

Abstract:
An imprint apparatus, comprises: a discharge unit that discharges a liquid onto a substrate; a storage unit that stores a plurality of discharge conditions for the discharge unit; and a control unit that controls the discharge unit based on a discharge condition that is stored in the storage unit, wherein the control unit selects the discharge condition from the plurality of discharge conditions in accordance with a discharge spacing for discharging the liquid.
Public/Granted literature
- US20180318868A1 IMPRINT APPARATUS AND METHOD OF CONTROLLING THE SAME Public/Granted day:2018-11-08
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