Invention Grant
- Patent Title: ESD protection circuit with integral deep trench trigger diodes
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Application No.: US15445671Application Date: 2017-02-28
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Publication No.: US10373944B2Publication Date: 2019-08-06
- Inventor: Akram A. Salman , Muhammad Yusuf Ali
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Andrew R. Ralston; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L29/735

Abstract:
Disclosed examples include integrated circuits, fabrication methods and ESD protection circuits to selectively conduct current between a protected node and a reference node during an ESD event, including a protection transistor, a first diode and a resistor formed in a first region of a semiconductor structure, and a second diode formed in a second region isolated from the first region by a polysilicon filled deep trench, where the first and second diodes include cathodes formed by deep N wells alongside the deep trench in the respective first and second regions to use integrated deep trench diode rings to set the ESD protection trigger voltage and prevent a parasitic deep N well/P buried layer junction from breakdown at lower than the rated voltage of the host circuitry.
Public/Granted literature
- US20180247925A1 ESD PROTECTION CIRCUIT WITH INTEGRAL DEEP TRENCH TRIGGER DIODES Public/Granted day:2018-08-30
Information query
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