- 专利标题: Corner coupling resonator array
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申请号: US15388093申请日: 2016-12-22
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公开(公告)号: US10367469B2公开(公告)日: 2019-07-30
- 发明人: Ville Kaajakari
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: JP Nagaokakyo-Shi, Kyoto-Fu
- 专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人: MURATA MANUFACTURING CO., LTD.
- 当前专利权人地址: JP Nagaokakyo-Shi, Kyoto-Fu
- 代理机构: Arent Fox LLP
- 主分类号: H03H9/02
- IPC分类号: H03H9/02 ; H03H9/205 ; H03H9/50 ; H03H9/15 ; H03H9/24
摘要:
A MEMS resonator array is provided with improved electrical characteristics and reduced motional impedance at high frequency applications. The MEMS resonator array includes a pair of first piezoelectric resonators that are opposed to each other with a space defined therebetween. Moreover, the MEMS resonator array includes a pair of second piezoelectric resonators that are opposed to each other and that are each coupled to respective corners of each of the first piezoelectric resonators. As such, each of the second piezoelectric resonators is partially disposed in the space defined between the pair of first piezoelectric resonators.
公开/授权文献
- US20180183403A1 CORNER COUPLING RESONATOR ARRAY 公开/授权日:2018-06-28
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