- 专利标题： APD focal plane arrays with backside vias
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申请号： US15913632申请日： 2018-03-06
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公开(公告)号： US10367111B2公开(公告)日： 2019-07-30
- 发明人: Brian Piccione , Mark Allen Itzler
- 申请人： ARGO AI, LLC
- 申请人地址： US PA Pittsburgh
- 专利权人： ARGO AI, LLC
- 当前专利权人： ARGO AI, LLC
- 当前专利权人地址： US PA Pittsburgh
- 代理机构： Kaplan Breyer Schwarz, LLP
- 主分类号： H01L31/107
- IPC分类号： H01L31/107 ; H01L27/146 ; H01L31/02 ; H01L31/0304 ; H01L31/0232
摘要：
An avalanche photodiode (APD) array with reduced cross talk comprises, in the illustrative embodiment, a 2D array of Geiger-mode APDs, wherein a via is formed partially through the backside (substrate) of each APD in the array, wherein the via is offset from the active region of each said APD.
公开/授权文献
- US20180198016A1 APD Focal Plane Arrays with Backside Vias 公开/授权日：2018-07-12
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