- Patent Title: Apparatus and method for manufacturing a pellicle, and a pellicle
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Application No.: US15101506Application Date: 2014-11-19
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Publication No.: US10365558B2Publication Date: 2019-07-30
- Inventor: Maarten Mathijs Marinus Jansen , Juan Diego Arias Espinoza , Johannes Peterus Henricus De Kuster
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox, P.L.L.C.
- Priority: EP13195872 20131205
- International Application: PCT/EP2014/074977 WO 20141119
- International Announcement: WO2015/082214 WO 20150611
- Main IPC: G03F1/62
- IPC: G03F1/62 ; G03F1/24 ; G03F1/66 ; G03F7/20
Abstract:
An apparatus for manufacturing a pellicle, the apparatus comprising: a stressing assembly for stressing a film; and a substrate support for supporting a substrate, the stressing assembly and the substrate support being capable of relative movement so as to bring the substrate into contact with the film when the film is stressed.
Public/Granted literature
- US20160313637A1 Apparatus and Method for Manufacturing a Pellicle, and a Pellicle Public/Granted day:2016-10-27
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