- 专利标题: Long travel air bearing linear stage
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申请号: US15724938申请日: 2017-10-04
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公开(公告)号: US10364842B2公开(公告)日: 2019-07-30
- 发明人: Robert Pittsley , Nicholas Sotiropoulos
- 申请人: NEW WAY MACHINE COMPONENTS, INC.
- 申请人地址: US PA Aston
- 专利权人: New Way Machine Components, Inc.
- 当前专利权人: New Way Machine Components, Inc.
- 当前专利权人地址: US PA Aston
- 代理机构: Volpe and Koenig, P.C.
- 主分类号: F16C32/06
- IPC分类号: F16C32/06 ; B65G47/74 ; B65G51/03
摘要:
A long travel aerostatic linear stage includes a plurality of rails, a plurality of planar bearing plates, and a plurality of porous media gas bearing. The plurality of planar bearing plates are aligned with and attached to the rails. Each planar bearing plate includes a plurality of metal plates having machined air bearing surfaces. The plurality of porous media gas bearings float on the bearing plates in a non-contact frictionless manner to support a traversing load and control lateral motion of the rails. The rails may include at least one rail which supports the traversing load and at least one rail which controls the lateral motion. The bearing plates are restrained and attached to the rails in a manner that ensures the planar nature of the bearing plates are maintained and the air gap is effective.
公开/授权文献
- US20180094673A1 LONG TRAVEL AIR BEARING LINEAR STAGE 公开/授权日:2018-04-05
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