- Patent Title: Seed material for liquid phase epitaxial growth of monocrystalline silicon carbide, and method for liquid phase epitaxial growth of monocrystalline silicon carbide
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Application No.: US13996077Application Date: 2011-06-29
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Publication No.: US10358741B2Publication Date: 2019-07-23
- Inventor: Satoshi Torimi , Satoru Nogami , Tsuyoshi Matsumoto
- Applicant: Satoshi Torimi , Satoru Nogami , Tsuyoshi Matsumoto
- Applicant Address: JP Osaka
- Assignee: TOYO TANSO CO., LTD.
- Current Assignee: TOYO TANSO CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Keating and Bennett, LLP
- Priority: JP2010-288467 20101224; JP2010-288470 20101224; JP2010-288473 20101224; JP2010-288477 20101224
- International Application: PCT/JP2011/064876 WO 20110629
- International Announcement: WO2012/086238 WO 20120628
- Main IPC: C30B19/12
- IPC: C30B19/12 ; C30B29/36 ; C30B28/14

Abstract:
Provided is an inexpensive seed material for liquid phase epitaxial growth of silicon carbide. A seed material 12 for liquid phase epitaxial growth of a monocrystalline silicon carbide includes a surface layer containing a polycrystalline silicon carbide with a 3C crystal polymorph. Upon X-ray diffraction of the surface layer thereof, a first-order diffraction peak corresponding to a (111) crystal plane is observed as a diffraction peak corresponding to the polycrystalline silicon carbide with a 3C crystal polymorph but no other first-order diffraction peak having a diffraction intensity of 10% or more of the diffraction intensity of the first-order diffraction peak corresponding to the (111) crystal plane is observed.
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