- 专利标题: Sealed resistive change elements
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申请号: US15486032申请日: 2017-04-12
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公开(公告)号: US10355206B2公开(公告)日: 2019-07-16
- 发明人: C. Rinn Cleavelin , Claude L. Bertin , Thomas Rueckes
- 申请人: Nantero, Inc.
- 申请人地址: US MA Woburn
- 专利权人: Nantero, Inc.
- 当前专利权人: Nantero, Inc.
- 当前专利权人地址: US MA Woburn
- 代理机构: Nantero, Inc.
- 主分类号: H01L27/24
- IPC分类号: H01L27/24 ; H01L45/00
摘要:
Methods for scaling dimensions of resistive change elements, resistive change element arrays of scalable resistive change elements, and sealed resistive change elements are disclosed. According to some aspects of the present disclosure the methods for scaling dimensions of resistive change elements and the resistive change element arrays of scalable resistive change elements reduce the impact of overlapping materials on the switching characteristics of resistive change elements. According to some aspects of the present disclosure the methods for scaling dimensions of resistive change elements include sealing surfaces of resistive change elements. According to some aspects of the present disclosure the methods for scaling dimensions of resistive change elements include forming barriers to copper migration in a copper back end of the line.
公开/授权文献
- US20180226578A1 SEALED RESISTIVE CHANGE ELEMENTS 公开/授权日:2018-08-09
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