- 专利标题: Manufacturing method of package structure having embedded bonding film
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申请号: US16008045申请日: 2018-06-14
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公开(公告)号: US10283455B2公开(公告)日: 2019-05-07
- 发明人: Dyi-Chung Hu
- 申请人: Dyi-Chung Hu
- 代理机构: JCIPRNET
- 主分类号: H01L21/48
- IPC分类号: H01L21/48 ; H01L23/00 ; H01L25/00 ; H01L25/18 ; H01L23/538 ; H01L25/065
摘要:
A manufacturing method of a package structure having an embedded bonding film comprises the following steps: forming a bonding film, forming a redistribution substrate and forming a core on a bottom side of the redistribution substrate opposite to the top side. The bonding film comprises the following steps: forming a plurality of dielectric layers and metal circuit layers sequentially and alternatively in a plurality of bonding areas; exposing a plurality of top metal pads of a topmost metal circuit layer among the metal circuit layers in the plurality of bonding areas; and etching to form a bonding film. The bonding film has a left longitudinal branch and a lower latitudinal branch. A lower end of the left longitudinal branch is connected to a left end of the lower latitudinal branch. The left longitudinal branch and the lower latitudinal branch form an L shape.
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